Flexray free-form illuminator
WebApr 9, 2010 · This paper investigates the application of source-mask optimization (SMO) techniques for 28 nm logic device and beyond. We systematically study the impact of source and mask complexity on lithography performance. For the source, we compare SMO results for the new programmable illuminator (ASML's FlexRay) and standard diffractive … WebScanner matching for standard and freeform illumination shapes ... EN English Deutsch Français Español Português Italiano Român Nederlands Latina Dansk Svenska Norsk Magyar Bahasa Indonesia Türkçe Suomi Latvian …
Flexray free-form illuminator
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WebDec 3, 2009 · This paper describes the principle and performance of a fully programmable illuminator for a high-NA immersion system. Sources can be generated on demand, by manipulating an array of mirrors instead of the traditional way of inserting optical elements and changing lens positions. All mirrors are always used to create the source such that … WebMar 1, 2010 · This, together with the new illumination system FlexRay™, which can easily generate freeform illumination shapes [8], is a powerful imaging enhancement. Process …
WebMar 22, 2011 · As is well recognized, source mask optimization (SMO) is a highly effective means of extending the lifetime of a certain photolithography generation without an expensive upgrade to the next generation optical system. More than an academic theory, source optimization first found practical applications in the debut of the pixel-like … WebThis paper describes the principle and performance of FlexRay, a fully programmable illuminator for high NA immersion systems. Sources can be generated on demand, by manipulating an array of mirrors instead of the traditional way of inserting optical elements and changing lens positions. ... On demand (freeform) source availability allows for ...
WebAbstract. IC manufacturers have a strong demand for transferring a working process from one scanner to another. Recently, a programmable illuminator (FlexRay TM) became … WebBut in our industry, time is money. In today’s ASML DUV systems, the FlexRay free-form illuminator features an array of 4,000 individually controllable mirrors that, together, can …
WebJul 14, 2010 · Freeform versus standard illumination comparison for an 0.078µm2 SRAM contact layer (split for double patterning), exposed on an ASML XT:1950i with FlexRay …
WebIC manufacturers have a strong demand for transferring a working process from one scanner to another. Recently, a programmable illuminator (FlexRay TM) became available on ASML ArF immersion scanners that, besides all the parameterized source shapes of the earlier Aerial TM illuminator (based on diffractive optical elements) can also produce … mount baker hiking clubWebThe FlexRay Prepared Illuminator extends the range of conventional and off-axis illumination to enable advanced pupil shaping for low-k1 imaging. 03. Imaging performance. The NXT:2000i can achieve a 2.5 nm cross-matching on-product overlay. The new ORION alignment sensor offers more accurate alignment measurements and enhanced process ... mount baker high school athleticsWebSep 29, 2015 · 1.2 FlexRay illuminator to provide freeform illumination. In freeform illumination, there is basically unlimited freedom in intensity and position of the light in … heart class 11 diagramWebThis paper describes the principle and performance of FlexRay, a fully programmable illuminator for high NA immersion systems. Sources can be generated on demand, by … mount baker hiking trail conditionsWebSelect Value Meat, Poultry or Protein Processed Foods Canned or Bottled Goods Beverages Dairy Raw Materials or Ingredients Pet and Animal Products A Non-Food … heart classesWebAs is well recognized, source mask optimization (SMO) is a highly effective means of extending the lifetime of a certain photolithography generation without an expensive upgrade to the next generation optical system. More than an academic theory, source optimization first found practical applications in the debut of the pixel-like programmable illuminator … heart class 12WebJun 1, 2011 · Also the first results in resist obtained on a XTIV 1950Hi 1.35 NA tool equipped with this illuminator are presented and compared to measurements on the same system when it was equipped with an ... mount baker hill climb